Publications

Design, Fabrication and Characterization of Scandium Aluminum Nitride Based Piezoelectric Micromachined Ultrasonic Transducers

2016 Qi Wang, Yipeng Lu, Sergey Mishin, Yury Oshmyansky, David A. Horsley

2016 Journal of Microelectromechanical Systems

AlN Film Stress and Uniformity for BAW filters on 200mm wafers

2016 Sergey Mishin, Yury Oshmyansky

2016 IEEE ULTRASONICS SYMPOSIUM.

Scandium doped Aluminum Nitride based piezoelectric micromachined ultrasound transducers

2016 Q. Wang1, Y. Lu, S. Fung, X. Jiang, S. Mishin, Y. Oshmyansky, D.A. Horsley

2016 Hilton Head Workshop, A Solid-State Sensors, Actuators and Microsystems Workshop

Improving Manufacturability of FBAR filters on 200mm wafers

2016 Sergey Mishin, Yury Oshmyansky

2016 IEEE FREQUENCY CONTROL SYMPOSIUM.

Operation modes of the FALCON ion source as a part of the AMS cluster tool

2015 Oleksii Girka, Alexander Bizyukov, Ivan Bizyukov, Michael Gutkin, Sergei Mishin

NUKLEONIKA 2015;60(2):327 330 doi: 10.1515/nuka-2015-0059.

Manufacturability of highly doped Aluminum Nitride films

2015 Sergey Mishin, Yury Oshmyansky

2015 IEEE FREQUENCY CONTROL SYMPOSIUM.

Production worthy system for piezoelectric multi-material depositions

2014 Sergey Mishin, Michael Gutkin

2014 IEEE FREQUENCY CONTROL SYMPOSIUM.

Improving frequency Control of Temperature Compensated Surface Acoustic Wave Devices

2013 Sergey Mishin, Michael Gutkin, Alexander Bizyukov, Vladimir Sleptsov

2013 IEEE FREQUENCY CONTROL SYMPOSIUM

Method of controlling coupling coefficient of Aluminum Scandium Nitride deposition in high volume production

2013 Sergey Mishin, Michael Gutkin, Alexander Bizyukov, Vladimir Sleptsov

2013 IEEE FREQUENCY CONTROL SYMPOSIUM.

Production Issues in Using Silicon Dioxide Films for Temperature Compensated Bulk and Surface Acoustic Wave Devices

2012 Sergey Mishin, Michael Gutkin

2012 IEEE FREQUENCY CONTROL SYMPOSIUM.

Improving Manufacturability of Bulk Acoustic Wave and Surface Acoustic Wave Devices

2011 Sergey Mishin

2011 IEEE SPAWDA.

Effect of Substrate Material and Electrode Surface Preparation on Stress and Piezoelectric Properties of Aluminum Nitride

2011 Sergey Mishin, Michael Gutkin

2011 IEEE FREQUENCY CONTROL SYMPOSIUM.

Characterization of Reversed c-axis AlN Thin Films

2010 John D. Larson III (Fellow), Sergey Mishin, Stefan Bader

2010 IEEE ULTRASONICS SYMPOSIUM

Practical issues with ion beam milling in acoustic wave resonator technologies

2010 Sergey Mishin, Yury Oshmyansky and Frank Bi

2010 NANO-TECH CONFERENCE.

Thickness Control by Ion Beam Milling in Acoustic Resonator Devices

2010 Sergey Mishin, Yury Oshmyansky and Frank Bi

2010 IEEE FREQUENCY CONTROL SYMPOSIUM

RF Bulk Acoustic Wave Filters for Communications

2009 Sergey Mishin, Yury Oshmyansky

Ken-ya Hashimoto, Artech House, 2009

Chapter 7. Thin Films Deposition for BAW devices

Damage-Free Cathode Coating Process for OLEDs

2008 Shiva Prakash, DuPont Displays

2008 SID INTERNATIONAL SYMPOSIUM.

Improving Manufacturability of AlN Deposition Used in Making Bulk Acoustic Wave Devices

2005 Sergey Mishin, Brian Sylvia and Daniel R. Marx

2005 IEEE ULTRASONICS SYMPOSIUM

Sputtered AlN Thin Films on Si and Electrodes for MEMS Resonators: Relationship Between Surface Quality Microstructure and Film Properties

2003 S. Mishin, D. R. Marx and B. Sylvia, V. Lughi, K. L. Turner, and D. R. Clarke

2003 IEEE ULTRASONICS SYMPOSIUM

Sputtering Processes for Bulk Acoustic Wave Filters

2003 Sergey Mishin, Yury Oshmyansky, John D. Larson Ph.D., Richard Ruby Ph.D.

Semiconductor International, 3/1/2003