PVD Deposition and Etch/Trimming/Tuning Processes

AMSystems is fully equipped to provide in-house thin film deposition, ion milling, thickness/uniformity trimming, comprehensive testing, and production in low and high quantities.

AMSystems provides an extensive range of custom thin film deposition range from 100A to 70,000A, including:

Piezoelectric films, such as aluminum nitride (AlN) or doped AlN thin films
Metal films, such as molybdenum (Mo), tungsten (W), titanium (Ti) and other films
Dielectric films

We provide frequency/thickness tuning for any thin films to within 0.05% uniformity across substrate and thickness adjustment up to +/- 4A of the required thickness.

AMSystems specializes in providing complete solution in FBAR/BAW/p-MEMS piezoelectric and electrode depositions as well as frequency/thickness trimming.