LEADER IN PIEZOELECTRIC THIN FILM PROCESSING EQUIPMENT
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ApplicationsFBAR/BAWSAWPiezo-MEMSSOI, Lithium Tantalite/Niobate TrimmingRead More...
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Comprehensive Trimming / Tuning SolutionsFrequency AdjustmentThickness Uniformity ControlsThickness Wafer to Wafer ControlRead More...
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Unique and Customized Cluster ToolsOne Platform for Deposition and TrimmingThickness Control to 1 nmProven Performance in High Volume Production
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Piezoelectric Thin Films DepositionAluminum Nitride (AlN)Aluminum Scandium Nitride (AlScN)Read More...
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Electrode DepositionTungsten (W)Molybdenum (Mo)Others Including: Pt, Ru, TiRead More...
CUSTOMIZED SERVICES FROM DESIGN TO PRODUCTION TO MEET YOUR UNIQUE CHALLENGE
Working with Industry, R&D Labs and Leading Universities for over 20 years
World’s smallest footprint
Economical and reliable system design
First in High Volume Production
Developed first high volume Aluminum Nitride system for FBAR filters
Single Platform for Trimming / Deposition
The only combined trimming and deposition system
